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Title: Study of copper-silicon junctions fabricated by selective electroless deposition
Authors: Dhingra, Sunil
Arora, Sanjiv
George, P J
Keywords: Copper-silicon junctions;Electroless deposition;Metal semiconductor
Issue Date: Dec-2004
Publisher: CSIR
IPC Code: H01L
Abstract: The metal semiconductor contacts have been fabricated by electroless deposition of copper on chemically cleaned p-type silicon and their characteristics studied. A continuous thin film of good quality and adhesion is formed. The values of barrier height and the ideality factor are found to be comparable to those of vacuum evaporated contacts. The barrier heights measured from I-V and C-V characteristics are also found to be comparable.
Page(s): 916-920
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.42(12) [December 2004]

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