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IJPAP Vol.42(03) [March 2004] >

Title: Optical and electrical properties of indium-tin oxide films
Authors: Rao, K Narasimha
Keywords: Optical properties
Indium tin oxide films
electrical properties
Issue Date: Mar-2004
Publisher: CSIR
IPC CodeC01G
Abstract: Indium-tin oxide films find several applications because of their excellent properties such as high optical transparency, good electrical conductivity, high infrared reflectance etc. Achieving these properties depend on the choice of the deposition technique and the control of process parameters. It is all the more beneficial if these properties are to be realized at ambient temperature and without post deposition heating. In this investigation, indium-tin oxide films have been deposited by reactive electron beam evaporation of In+Sn alloy both in neutral and ionized oxygen environments. A low energy ion source has been used to ionize oxygen. Films deposited with neutral oxygen exhibited very low optical transmittance (5% at 550nm). Highly transparent (90%) and low resistivity (510-4 ohm cm) films have been deposited on glass in ionized oxygen at ambient substrate temperature. As deposited films on ambient substrate with very low resistivity obtained by evaporation, are very significant
Page(s): 201-204
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Source:IJPAP Vol.42(03) [March 2004]

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