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Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.43 [2005] >
IJPAP Vol.43(08) [August 2005] >
| Title: | Simple diffusion wave analyzer |
| Authors: | Sreekumar, K |
| Keywords: | Diffusion waves
Photothermal radiometry
Laser diode
Wafer metrology |
| Issue Date: | Aug-2005 |
| Publisher: | CSIR |
| IPC Code: | H01L29/861 |
| Abstract: | A simple,
cost-effective, compact and efficient photothermal diffusion wave analyzer for
1 Hz-150 kHz frequency band has been developed and analyzed. The sensitivity is
12 nV and the total error is about 1.5% at 60 dB dynamic reserve, excluding the
laser intensity variation that may be corrected. The input voltage and current
noises are 15nV/ and 2fA/, respectively. The low power consumption of about 4 W is
advantageous for long time off-line applications. The instrument has been used
for the metrology of silicon wafers by radiometric simulations. Results
regarding the studies on transport parameters and contamination control are
presented. |
| Page(s): | 596-601 |
| ISSN: | 0975-1041 (Online); 0019-5596 (Print) |
| Source: | IJPAP Vol.43(08) [August 2005]
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