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Title: Simple diffusion wave analyzer
Authors: Sreekumar, K
Keywords: Diffusion waves;Photothermal radiometry;Laser diode;Wafer metrology
Issue Date: Aug-2005
Publisher: CSIR
IPC Code: H01L29/861
Abstract: A simple, cost-effective, compact and efficient photothermal diffusion wave analyzer for 1 Hz-150 kHz frequency band has been developed and analyzed. The sensitivity is 12 nV and the total error is about 1.5% at 60 dB dynamic reserve, excluding the laser intensity variation that may be corrected. The input voltage and current noises are 15nV/ and 2fA/, respectively. The low power consumption of about 4 W is advantageous for long time off-line applications. The instrument has been used for the metrology of silicon wafers by radiometric simulations. Results regarding the studies on transport parameters and contamination control are presented.
Page(s): 596-601
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.43(08) [August 2005]

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