NISCAIR Online Periodicals Repository

Research Journals >
Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.43 [2005] >
IJPAP Vol.43(08) [August 2005] >

Title: Simple diffusion wave analyzer
Authors: Sreekumar, K
Keywords: Diffusion waves
Photothermal radiometry
Laser diode
Wafer metrology
Issue Date: Aug-2005
Publisher: CSIR
IPC CodeH01L29/861
Abstract: A simple, cost-effective, compact and efficient photothermal diffusion wave analyzer for 1 Hz-150 kHz frequency band has been developed and analyzed. The sensitivity is 12 nV and the total error is about 1.5% at 60 dB dynamic reserve, excluding the laser intensity variation that may be corrected. The input voltage and current noises are 15nV/ and 2fA/, respectively. The low power consumption of about 4 W is advantageous for long time off-line applications. The instrument has been used for the metrology of silicon wafers by radiometric simulations. Results regarding the studies on transport parameters and contamination control are presented.
Page(s): 596-601
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Source:IJPAP Vol.43(08) [August 2005]

Files in This Item:

File Description SizeFormat
IJPAP 43(8) 596-601.pdf243.37 kBAdobe PDFView/Open
 Current Page Visits: 165 
Recommend this item


Online Submission of Articles |  NISCAIR Website |  National Knowledge Resources Consortium |  Contact us |  Feedback

Disclaimer: NISCAIR assumes no responsibility for the statements and opinions advanced by contributors. The editorial staff in its work of examining papers received for publication is helped, in an honorary capacity, by many distinguished engineers and scientists.

CC License Except where otherwise noted, the Articles on this site are licensed under Creative Commons License: CC Attribution-Noncommercial-No Derivative Works 2.5 India

Copyright © 2015 The Council of Scientific and Industrial Research, New Delhi. All rights reserved.

Powered by DSpace Copyright © 2002-2007 MIT and Hewlett-Packard | Compliant to OAI-PMH V 2.0

Home Page Total Visits: 162949 since 01-Sep-2015  Last updated on 21-Jun-2016Webmaster: