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NISCAIR ONLINE PERIODICALS REPOSITORY (NOPR) >
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Indian Journal of Engineering and Materials Sciences (IJEMS) >
IJEMS Vol.12 [2005] >
IJEMS Vol.12(1) [February 2005] >
| Title: | Silica-on-silicon based 1 N optical splitter: Design, fabrication and characterization |
| Authors: | Baby, Aji
Dhanavantri, C
Pachauri, J P
Johri, S
Kumar, Pawan
Singh, B R |
| Issue Date: | Feb-2005 |
| Publisher: | CSIR |
| IPC Code: | H 01 R 31/02 |
| Abstract: | The present
paper deals with the design, fabrication technology and performance of
silica-on-silicon based 14 and 18 optical power splitter. The basic waveguide structure with S-bends and Y-junctions have
been used for the splitter design using BPM software. The optimized process
parameters related to choice of metal masking layer, chemistry used for deep
dry etching of core layer, dependence of etch process parameters on anisotropy
and sidewall smoothness, dicing and fibre alignment are presented. An
indigenously built ECR/RIE system especially for deep dry etching of silica
layer is also described. The results on splitting insertion loss and uniformity
maximum across the channel measured on 14
and 18 splitters are
presented. |
| Page(s): | 12-16 |
| ISSN: | 0975-1017 (Online); 0971-4588 (Print) |
| Source: | IJEMS Vol.12(1) [February 2005]
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