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Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.44 [2006] >
IJPAP Vol.44(11) [November 2006] >
| Title: | Gas sensing properties of undoped and antimony doped tin oxide films prepared by spray pyrolysis and electron beam evaporation method |
| Authors: | Shamala, K S
Murthy, L C S
Rao, K Narasimha |
| Keywords: | Tin oxide films
Spray pyrolysis
Vacuum evaporation
Gas sensors |
| Issue Date: | Nov-2006 |
| Publisher: | CSIR |
| IPC Code: | C30B |
| Abstract: | The thin films of
undoped and antimony doped tin oxide films were prepared on glass substrates by
spray pyrolysis and electron beam evaporation techniques. The substrate
temperature was varied between 300 and 370°C in case of spray pyrolysis and 200°C in case of electron beam evaporation. The films were tested as gas
sensors in the presence of liquid petroleum gas (LPG) and compressed natural
gas (CNG). Undoped and antimony doped tin oxide films prepared by spray
pyrolysis were more sensitive to LPG. Sensitivity of spray deposited ATO film
in the presence of 1000 PPM of LPG was found to be 0.86 at an operating
temperature of 400°C and it was 0.23 for undoped film.
Undoped tin oxide films prepared by electron beam evaporation showed a maximum
sensitivity of 0.79 at an operating temperature of 375°C on its exposure to 1000 PPM of LPG. The performance of the sensor
has been explained on the basis of the structure and conduction mechanism of
the tin oxide film. |
| Page(s): | 867-870 |
| ISSN: | 0975-1041 (Online); 0019-5596 (Print) |
| Source: | IJPAP Vol.44(11) [November 2006]
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