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IJPAP Vol.44(11) [November 2006] >


Title: Gas sensing properties of undoped and antimony doped tin oxide films prepared by spray pyrolysis and electron beam evaporation method
Authors: Shamala, K S
Murthy, L C S
Rao, K Narasimha
Keywords: Tin oxide films
Spray pyrolysis
Vacuum evaporation
Gas sensors
Issue Date: Nov-2006
Publisher: CSIR
IPC CodeC30B
Abstract: The thin films of undoped and antimony doped tin oxide films were prepared on glass substrates by spray pyrolysis and electron beam evaporation techniques. The substrate temperature was varied between 300 and 370°C in case of spray pyrolysis and 200°C in case of electron beam evaporation. The films were tested as gas sensors in the presence of liquid petroleum gas (LPG) and compressed natural gas (CNG). Undoped and antimony doped tin oxide films prepared by spray pyrolysis were more sensitive to LPG. Sensitivity of spray deposited ATO film in the presence of 1000 PPM of LPG was found to be 0.86 at an operating temperature of 400°C and it was 0.23 for undoped film. Undoped tin oxide films prepared by electron beam evaporation showed a maximum sensitivity of 0.79 at an operating temperature of 375°C on its exposure to 1000 PPM of LPG. The performance of the sensor has been explained on the basis of the structure and conduction mechanism of the tin oxide film.
Page(s): 867-870
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Source:IJPAP Vol.44(11) [November 2006]

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