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Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.44 [2006] >
IJPAP Vol.44(09) [September 2006] >
| Title: | Study of ion and electron beam irradiation effects in Al-Sb bilayer thin films |
| Authors: | Mangal, R K
Singh, M
Vijay, Y K
Avasthi, D K |
| Keywords: | Thin films
Al-Sb, Ion irradiation
Electron irradiation
Absorption
RBS
Optical band gap |
| Issue Date: | Sep-2006 |
| Publisher: | CSIR |
| IPC Code: | H01L29/76 |
| Abstract: |
Thin films having
uniform thicknesses of aluminium over different thicknesses of antimony were
prepared by thermal evaporation (resistive heating) method at the pressure 10-5 torr. The samples were irradiated by
Ag12+ heavy ions of energy 160 Mev at the fluence 2.2 1013 ions/cm2. The similar set of these films have
also been irradiated by electron beam having energy 10 keV for two hours. The
optical absorption spectra and Rutherford back
scattering analysis have been carried out for these films. X-ray diffraction
spectra of virgin as well as ion irradiated sample, show orthorhombic structure
of the films. These results show that the
inter diffusion of bilayer with irradiation effects. It is also suggested that
ion beam irradiation gives
the better results in comparison to electron beam. These results confirm the
mixing of Al/Sb bilayer by irradiation process.
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| Page(s): | 685-689 |
| ISSN: | 0975-1041 (Online); 0019-5596 (Print) |
| Source: | IJPAP Vol.44(09) [September 2006]
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