Please use this identifier to cite or link to this item:
Title: Optimization of polymer coated silicon microcantilever for chemical sensing applications
Authors: Ganesan, M
Sharma, N K
Jain, V K
Keywords: Microcantilever;Resonance frequency;Mass sensitivity factor;Spring constant
Issue Date: May-2006
Publisher: NISCAIR-CSIR, India
IPC Code: B81B7/02
Abstract: The mechanical design and optimization of polymer coated silicon microcantilever (MC) for chemical sensing application have been studied through simple mass sensitivity factor. For this theoretical modeling, silicon is the base layer (substrate) and the functional layer can be selected according to the chemical detection. The mass sensitivity factor and spring constant change before and after chemical reactions have been analyzed theoretically by taking minimum of four hundred samples in each case study. Finally, the specific dimensions and guidelines for designing high sensitivity polymer coated microcantilever for chemical sensing application based on the case study have been suggested. The optimized microcantilever is theoretically analyzed with detection of water vapour and primary alcohols.
Page(s): 407-413
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.44(05) [May 2006]

Files in This Item:
File Description SizeFormat 
IJPAP 44(5) 407-413.pdf1.71 MBAdobe PDFView/Open

Items in NOPR are protected by copyright, with all rights reserved, unless otherwise indicated.