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|Title:||Thermodynamics of the production of condensed phases in the CVD process of BxC with BCl3-C3H6 (propylene)-H2 precursors|
|Abstract:||The temperature, pressure and the molar ratio of the injected gas mixture for the deposition of the condensed phases in the CVD process of BxC with BCl3-C3H6 (propylene)-H2 precursors are investigated in detail thermodynamically with a revised database including 329 species. The results show that the composition of the condensed phases is quite sensitive to both temperature and the molar ratios of BCl3/(BCl3+C3H6) and H2/(BCl3+C3H6) while it is less sensitive to pressure. The ideal conditions for the deposition of BxC are BCl3/(BCl3+C3H6) ratio within 0.88~0.92, H2/(BCl3+C3H6) ratio within 10~105.2 and temperature above 1100 K at lower pressures. The co-deposition of C or B with BxC is mainly controlled by the ratios of BCl3/(BCl3+C3H6) and H2/(BCl3+C3H6). The co-deposition of C with BxC should be in low BCl3/(BCl3+C3H6) (0.0~0.88) and H2/(BCl3+C3H6) (10-2<102.4) ratios while the co-deposition of B with BxC needs higher BCl3/(BCl3+C3H6) (0.92~1.0) and H2/(BCl3+C3H6) (104~105) ratios.|
|ISSN:||0975-1017 (Online); 0971-4588 (Print)|
|Appears in Collections:||IJEMS Vol.21(4) [August 2014]|
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