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Title: Design of a Patterned Substrate for Gas Sensor Applications
Authors: Ghanshyam, C
Mishra, Sunita
Ram, N
Singh, Satinder
Bajpai, R P
Bedi, R K
Issue Date: Oct-2002
Publisher: NISCAIR-CSIR, India
Abstract: Gas sensors based on semiconducting oxides can be used for the detection of combustible and noxious gases in air. Their advantages are high sensitivity, simple design, low weight and cost. The basic design of a gas sensor consists of two essential parts, viz. active layer and a contact array through which the active material can be interrogated. There has been  a lot of progress and work was done in the deposition of sensitive active layer by several researchers. However the design of a substrate IS equally important and will continue to play an important role on the performance of the sensor. The substrate design, design of the mask, and proposed in-house work are described.
Page(s): 802-804
ISSN: 0975-1084 (Online); 0022-4456 (Print)
Appears in Collections:JSIR Vol.61(10) [October 2002]

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