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IJPAP Vol.46(11) [November 2008] >

Title: Effect of carbon content on the mechanical properties of ternary boron-nitrogen-carbon compound
Authors: Chowdhury, M Pal
Dalui, S
Chakraborty, B R
Mukherjee, A
Pal, A K
Keywords: BNC films
Hard coatings
Chemical vapour deposition
Issue Date: Nov-2008
Publisher: CSIR
Abstract: BNC films have been deposited on Si (100) and fused silica substrates by inductively coupled plasma chemical vapour deposition (ICP-CVD) technique using a mixture of borane-ammonia, nitrogen and methane as precursor gases. Carbon content in the films is varied by changing the concentration of methane in the precursor gases. The films are amorphous in nature. The films, thus, deposited have been characterized by using Fourier Transform Infrared Spectroscopy (FTIR), X-ray diffraction and Secondary Ion Mass Spectroscopy (SIMS). Microstructural information has been obtained from SEM studies. Microhardness has been seen to decrease with the increase in carbon content and the highest microhardness observed in these films has been found to be ~5.3 GPa.
Page(s): 776-782
ISSN: 0019-5596
Source:IJPAP Vol.46(11) [November 2008]

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