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Title: Titania films deposited by thermal evaporation as humidity sensor
Authors: Yadav, B C
Shukla, R K
Keywords: Humidity sensors;Relative humidity;Fresnel equations
Issue Date: Sep-2003
Publisher: NISCAIR-CSIR, India
Abstract: The humidity sensors based on optical methods are best sui ted for those situations where remote analysis capability, high sensitivity and compactness of the device are the criteria for the measurement of humidity levels. The sensing element of optical humidity sensors consists of a rutile structured TiO2 thin film deposited on the base of an isosceles glass prism. Such a TiO2 film is porous and highly sensitive to humidity. Light from He-Ne laser source enters the prism from one of the isosceles faces of the prism, and then gets reflected from the glass film interface, before emerging out from the other isosceles face of the prism. The emergent beam is collected through an optical fiber, which is connected to an optical power meter for measurement. Variations in the intensity of light caused by changes in humidity lying in the range 5-95% have been recorded.
Page(s): 681-685
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.41(09) [September 2003]

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