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Title: Development of an ion micro-beam facility at Institute of Physics, Bhubaneswar
Authors: Rout, B
Ghose, S K
Dey, S
Mahapatra, D P
Dev, B N
Bakhru, H
Issue Date: Jan-2001
Publisher: NISCAIR-CSIR, India
Abstract: An ion micro-beam facility has been setup at one of the beam lines of the 3MV tandem Pelletron accelerator facility at IOP, Bhubaneswar. This is the first facility of its kind in the country having potential applications in the growing fields involving semiconductors, materials science, biology, archeology and environmental science, from both scientific and industrial point of view. So far we have achieved a spatial resolution of 4 μm. A brief description of the experimental set-up is given. Elemental maps, obtained by RBS measurements on a transmission electron micro scope grid and on epitaxial gold-silicide islands grown on Si(110) surfaces, are presented.
Page(s): 62-64
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.39(01-02) [January-February 2001]

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