|
NISCAIR ONLINE PERIODICALS REPOSITORY (NOPR) >
NISCAIR PUBLICATIONS >
Research Journals >
Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.45 [2007] >
IJPAP Vol.45(04) [April 2007] >
| Title: | Studies on RF MEMS shunt switch |
| Authors: | Sharma, Preeti
Koul, Shiban K
Chandra, Sudhir |
| Keywords: | MEMS shunt switch
Finite-element method
Coplanar Waveguide
RF MEMS |
| Issue Date: | Apr-2007 |
| Publisher: | CSIR |
| IPC Code: | B81B7/02 |
| Abstract: | Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophisticated modeling techniques because of their complicated 3-D geometries with critical aspect ratios and strong in-homogeneities. In this paper, the effect of various geometric dimensional parameters on the electromagnetic and mechanical behaviour of a shunt capacitive MEMS switch using finite element method based Ansoft High Frequency Structure Simulator (HFSS) software tool has been presented. This exercise will provide a better insight into designing a reliable and high-performance MEMS shunt switch. |
| Page(s): | 387-394 |
| ISSN: | 0019-5596 |
| Source: | IJPAP Vol.45(04) [April 2007]
|
|
