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IJPAP Vol.45(04) [April 2007] >

Title: Studies on RF MEMS shunt switch
Authors: Sharma, Preeti
Koul, Shiban K
Chandra, Sudhir
Keywords: MEMS shunt switch
Finite-element method
Coplanar Waveguide
Issue Date: Apr-2007
Publisher: CSIR
IPC CodeB81B7/02
Abstract: Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophisticated modeling techniques because of their complicated 3-D geometries with critical aspect ratios and strong in-homogeneities. In this paper, the effect of various geometric dimensional parameters on the electromagnetic and mechanical behaviour of a shunt capacitive MEMS switch using finite element method based Ansoft High Frequency Structure Simulator (HFSS) software tool has been presented. This exercise will provide a better insight into designing a reliable and high-performance MEMS shunt switch.
Page(s): 387-394
ISSN: 0019-5596
Source:IJPAP Vol.45(04) [April 2007]

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