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|Title:||Piezoresistive effects of resonant tunneling structure for application in micro-sensors|
|Keywords:||Resonant tunneling;Piezoresistor;Double-barrier microstructure;Superlattice|
|IPC Code:||B06B1/06; C30B|
|Abstract:||In this paper, piezoresistive properties of resonant tunneling structure made of undoped InGaAs/AlAs double-barrier quantum layers have been experimentally investigated, and the resonant tunneling structure was grown by molecular beam epitaxy (MBE) on semi-insulation (001)-oriented GaAs substrate. We found that the piezoresistivity of such quantum layers is about one order higher than that of the commonly used silicon structures. Micro accelerometers based on InGaAs/AlAs double-barrier resonant tunneling structures have also been designed and fabricated by control hole technique.|
|Appears in Collections:||IJPAP Vol.45(04) [April 2007]|
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