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|Title:||Measurement and simulation of carbon nanotube’s piezoresistance property by a micro/nano combined structure|
|Keywords:||Piezoresistance;Carbon nanotube;Micro/nano combined device|
|IPC Code:||B82B; H01L41/00|
|Abstract:||In this paper, the present status of carbon nanotube’s electromechanical properties was reviewed. The relationships among the carbon nanotube’s resistance, gauge factor and the rates of change of the band gaps with strain (dEℊ/dƐ) were analyzed and simulated. Then, a micro/nano combined device and method for measuring the piezoresistance property of carbon nanotube were proposed. The device is consisted of a silicon chip and a printed circuit board which is used for loading and leading wire. The microelectrodes were fabricated on the silicon chip by FIB and a CVD-growth single-wall carbon nanotube was connected with the microelectrodes. The voltage-current characteristic of the carbon nanotube was measured using the proposed device. The relationship between the current and the voltage is basically linear, which demonstrates that the carbon nanotube is metallic. The experimental results show that the micro/nano combined device can be used for measuring the piezoresistance of carbon nanotube in our future work.|
|Appears in Collections:||IJPAP Vol.45(04) [April 2007]|
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