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Title: Micromachined conductor backed coplanar waveguides for millimeter wave circuit application
Authors: Koul, Shiban K
Kumbhat, Abhishek
Basu, Ananjan
Keywords: Micromachined CBCPW line;RF MEMS;Discontinuity Models;Millimeter waves
Issue Date: Apr-2007
Publisher: CSIR
IPC Code: B81B7/02, H01P
Abstract: Conductor Backed Coplanar Waveguide (CBCPW) lines on Si micromachined substrate are in use for more than a decade, but their detailed analysis is still not available in the open literature. This paper presents design data and closed form expressions on characteristic parameters of CBCPW lines on Si-micromachined structures that are valid up to 40 GHz. Effect of various physical parameters are studied. Procedure for deriving lumped equivalent circuit models for discontinuities on Si-Micromachined substrate as a function of discontinuity physical parameters is also presented. Scattering parameters obtained from equivalent circuit models agree well with those obtained from full wave FEM for all the discontinuity structures. To show the usefulness of the data generated on discontinuities, design of a Ka-band band pass filter is described. The results presented are useful in designing micromachined components at microwave and millimeter wave frequencies.
Page(s): 336-344
ISSN: 0019-5596
Appears in Collections:IJPAP Vol.45(04) [April 2007]

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