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Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.45 [2007] >
IJPAP Vol.45(04) [April 2007] >
| Title: | Measurement of novel micro bulk defects in semiconductive materials based on Mie scatter |
| Authors: | Zheng, You
Yingpeng, Li
Jun, Chen |
| Keywords: | Non-destructive detection
Semiconductive material
Micro bulk defect
Generalized Lorenz
Mie Theory (GLMT)
Near-infrared laser
Scattering |
| Issue Date: | Apr-2007 |
| Publisher: | CSIR |
| IPC Code: | B81B7/02 |
| Abstract: | This paper introduces a new micro bulk defects measurement method in semiconductive materials, which scales the defects by analyzing scattering light distribute based on Generalized Lorenz and Mie Theory (GLMT). A method named character recognition and pick up two characters as defect criterions have been presented. Moreover, a set of experimental apparatus is built to prove the detect method and defect criterions. The micro bulk defects in semiconductive materials have been detected experimentally. |
| Page(s): | 372-376 |
| ISSN: | 0019-5596 |
| Source: | IJPAP Vol.45(04) [April 2007]
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