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Title: Measurement of novel micro bulk defects in semiconductive materials based on Mie scatter
Authors: Zheng, You
Yingpeng, Li
Jun, Chen
Keywords: Non-destructive detection;Semiconductive material;Micro bulk defect;Generalized Lorenz;Mie Theory (GLMT);Near-infrared laser;Scattering
Issue Date: Apr-2007
Publisher: CSIR
IPC Code: B81B7/02
Abstract: This paper introduces a new micro bulk defects measurement method in semiconductive materials, which scales the defects by analyzing scattering light distribute based on Generalized Lorenz and Mie Theory (GLMT). A method named character recognition and pick up two characters as defect criterions have been presented. Moreover, a set of experimental apparatus is built to prove the detect method and defect criterions. The micro bulk defects in semiconductive materials have been detected experimentally.
Page(s): 372-376
ISSN: 0019-5596
Appears in Collections:IJPAP Vol.45(04) [April 2007]

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