NISCAIR Online Periodicals Repository

Research Journals >
Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.45 [2007] >
IJPAP Vol.45(04) [April 2007] >

Title: Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing
Authors: Khanna, V K
Prasad, Mahanth
Dwivedi, V K
Shekhar, Chandra
Pankaj, A C
Basu, J
Keywords: Microhotplate
Gas sensor
Electro-thermal simulation
Issue Date: Apr-2007
Publisher: CSIR
IPC CodeH 01 L, G 01
Abstract: A microhotplate array comprising four 100 μm × 100 μm unit cells has been designed. It has a multi-layer structure: Si-thermal oxide-polySi-PECVD (plasma enhanced chemical vapour deposition) oxide-Sputtered Pt-Gas sensing film (SnO₂). Electro-thermal simulation of the unit cell has been carried out using ANSYS. The simulations show that for an applied bias of 4 V a mean temperature of 706ºC is obtained at the centre of the heater area. The heat is assumed to flow from the hot plate to the surrounding air at an ambient temperature of 30ºC by conduction. The power dissipation is less than 50 mW. The paper presents the design methodology of the hotplate.
Page(s): 332-335
ISSN: 0019-5596
Source:IJPAP Vol.45(04) [April 2007]

Files in This Item:

File Description SizeFormat
IJPAP 45(4) 332-335.pdf720.02 kBAdobe PDFView/Open
 Current Page Visits: 2110 
Recommend this item


Online Submission of Articles |  NISCAIR Website |  National Knowledge Resources Consortium |  Contact us |  Feedback

Disclaimer: NISCAIR assumes no responsibility for the statements and opinions advanced by contributors. The editorial staff in its work of examining papers received for publication is helped, in an honorary capacity, by many distinguished engineers and scientists.

CC License Except where otherwise noted, the Articles on this site are licensed under Creative Commons License: CC Attribution-Noncommercial-No Derivative Works 2.5 India

Copyright © 2015 The Council of Scientific and Industrial Research, New Delhi. All rights reserved.

Powered by DSpace Copyright © 2002-2007 MIT and Hewlett-Packard | Compliant to OAI-PMH V 2.0

Home Page Total Visits: 166900 since 01-Sep-2015  Last updated on 28-Jun-2016Webmaster: