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IJPAP Vol.45(04) [April 2007] >

Title: Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose
Authors: Pant, B D
Kumar, Mahesh
Lakshmi, Subha
Arora, Anil
Prasad, Mahanth
Sharma, Akshdeep
Patel, Mohan
Radhakrishnan, S
Dwivedi, V K
Keywords: Polymer gas sensor
Composite polymer
Conducting polymer
Electronic nose
Sensor array
Issue Date: Apr-2007
Publisher: CSIR
IPC CodeB81B7/02
Abstract: Sensor arrays capable of sensing different gases combined with a sampling system and a means of pattern classification and recognition comprise a basic system for an ‘Electronic Nose’ In the present work, a complete process for the fabrication of micro-cavities with sensing electrodes and volumes ranging from 2.5 to 12 nano-liters for the development of polymer gas sensors has been reported. An array of eight sensing cells in four sizes have been fabricated using SU-8 negative tone resist through UV-LIGA process developed at CEERI, Pilani. The length and width of the SU-8 cavities are: 250 X 250, 300 X 300, 500 X 500 and 500 X 600 micron and the depth of each of them was optimized to be 40 micron. These cavities filled with different polymer composites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication process in detail and the results obtained in ethanol and methanol ambient using a polymer composite developed through dissolution of styrene and polyaniline in PMMA. A number of other composites such as Pc-Ppy, Pr-Ppy, Fc⁺-PPy have also been synthesized and tested for a high sensitivity in carbon monoxide.
Page(s): 321-325
ISSN: 0019-5596
Source:IJPAP Vol.45(04) [April 2007]

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