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|Title:||Silicon-based MEMS fabrication techniques and standardization|
|Series/Report no.:||B81B7 /02|
|Abstract:||The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper.|
|Appears in Collections:||IJPAP Vol.45(04) [April 2007]|
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