Please use this identifier to cite or link to this item:
http://nopr.niscair.res.in/handle/123456789/2329| Title: | Silicon-based MEMS fabrication techniques and standardization |
| Authors: | Hao, Yilong |
| Keywords: | MEMS;Silicon-based MEMS;Micromachining |
| Issue Date: | Apr-2007 |
| Publisher: | CSIR |
| IPC Code: | B81B7 /02 |
| Abstract: | The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. |
| Page(s): | 317-320 |
| URI: | http://hdl.handle.net/123456789/2329 |
| ISSN: | 0019-5596 |
| Appears in Collections: | IJPAP Vol.45(04) [April 2007] |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| IJPAP 45(4) 317-320.pdf | 831.13 kB | Adobe PDF | View/Open |
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