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Title: Silicon-based MEMS fabrication techniques and standardization
Authors: Hao, Yilong
Keywords: MEMS;Silicon-based MEMS;Micromachining
Issue Date: Apr-2007
Publisher: CSIR
IPC Code: B81B7 /02
Abstract: The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper.
Page(s): 317-320
ISSN: 0019-5596
Appears in Collections:IJPAP Vol.45(04) [April 2007]

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