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Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.45 [2007] >
IJPAP Vol.45(04) [April 2007] >
| Title: | Silicon-based MEMS fabrication techniques and standardization |
| Authors: | Hao, Yilong |
| Keywords: | MEMS
Silicon-based MEMS
Micromachining |
| Issue Date: | Apr-2007 |
| Publisher: | CSIR |
| IPC Code: | B81B7 /02 |
| Abstract: | The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. |
| Page(s): | 317-320 |
| ISSN: | 0019-5596 |
| Source: | IJPAP Vol.45(04) [April 2007]
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