NISCAIR Online Periodicals Repository

Research Journals >
Indian Journal of Pure & Applied Physics (IJPAP) >
IJPAP Vol.45 [2007] >
IJPAP Vol.45(04) [April 2007] >

Title: Material selection for MEMS devices
Authors: Pratap, Rudra
Arunkumar, A
Keywords: MEMS devices
Material performance indices
Thermoelastic damping
MEMS gyroscope
MEMS ultrasound transducer
Issue Date: Apr-2007
Publisher: CSIR
IPC CodeB81B7/02
Abstract: As MEMS design matures and migrates from process centric design to performance based design, MEMS designers would need a rational method for selecting an appropriate material that is not based on ease of processing alone. While there is a growing number of thin film materials that can be used in micromachining for MEMS devices, the selection of a particular material is rarely based on quantifiable criterion that relates directly to the optimum performance of the device. In this study, we present a methodology for creating material related device performance indices that can be used for selecting best possible material for a device. This study is inspired by the Ashby approach and its extension to the microworld in recent studies, where materials are graded on material performance indices and the most appropriate material is selected from the Ashby charts so created. We extend this concept further in this paper and create device performance indices that can be used to grade MEMS materials in performance parameter space. We first create and discuss a material index for thermoelastic damping, an important index for vacuum packed dynamic MEMS devices that has been missing from the list of performance indices previously considered. We present two case studies of material selection, for a MEMS gyroscope and a MEMS ultrasound transducer, to illustrate the methodology and show two different approaches for creating optimality criterion in the presence of several competing performance indices.
Page(s): 358-367
ISSN: 0019-5596
Source:IJPAP Vol.45(04) [April 2007]

Files in This Item:

File Description SizeFormat
IJPAP 45(4) 358-367.pdf258.77 kBAdobe PDFView/Open
 Current Page Visits: 1726 
Recommend this item


Online Submission of Articles |  NISCAIR Website |  National Knowledge Resources Consortium |  Contact us |  Feedback

Disclaimer: NISCAIR assumes no responsibility for the statements and opinions advanced by contributors. The editorial staff in its work of examining papers received for publication is helped, in an honorary capacity, by many distinguished engineers and scientists.

CC License Except where otherwise noted, the Articles on this site are licensed under Creative Commons License: CC Attribution-Noncommercial-No Derivative Works 2.5 India

Copyright © 2015 The Council of Scientific and Industrial Research, New Delhi. All rights reserved.

Powered by DSpace Copyright © 2002-2007 MIT and Hewlett-Packard | Compliant to OAI-PMH V 2.0

Home Page Total Visits: 171793 since 01-Sep-2015  Last updated on 30-Jun-2016Webmaster: