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Title: Piezoelectric microvalve
Authors: Ramanamurthy, P V M
Ahrens, R
Karmalkar, S
Keywords: Piezoelectric microvalve
Issue Date: Apr-2007
Publisher: CSIR
Series/Report no.: H01L41/00
Abstract: A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric microvalve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm X 19 mm X 7 mm, an inlet diameter of 200 μm, a dead volume of 0.33 μl and has a steady-state flow-rate of about 240 sccm.
Description: 278-281
ISSN: 0019-5596
Appears in Collections:IJPAP Vol.45(04) [April 2007]

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