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Title: Variation of surface layer during chemical mechanical polish
Authors: Jianbin, Luo
Keywords: Tribology;Two phases flow;Wear;Chemical mechanical polish
Issue Date: Apr-2007
Publisher: CSIR
IPC Code: B82B
Abstract: Nanoparticles have been widely used in oils and polish slurry such as chemical mechanical polish (CMP) process. The movement of nanoparticles in liquid and the interaction between nano-particles and solid surface are very important to obtain an atomic smooth surface in CMP process. This paper presents both experimental and theoretical studies on the movement of nanoparticles in fluid and the collision between nanoparticles as well as that between the particles and solid surfaces in two phases flowing process.
Page(s): 403-405
ISSN: 0019-5596
Appears in Collections:IJPAP Vol.45(04) [April 2007]

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