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|Title:||Variation of surface layer during chemical mechanical polish|
|Keywords:||Tribology;Two phases flow;Wear;Chemical mechanical polish|
|Abstract:||Nanoparticles have been widely used in oils and polish slurry such as chemical mechanical polish (CMP) process. The movement of nanoparticles in liquid and the interaction between nano-particles and solid surface are very important to obtain an atomic smooth surface in CMP process. This paper presents both experimental and theoretical studies on the movement of nanoparticles in fluid and the collision between nanoparticles as well as that between the particles and solid surfaces in two phases flowing process.|
|Appears in Collections:||IJPAP Vol.45(04) [April 2007]|
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