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IJPAP Vol.45(04) [April 2007] >


Title: Development of silicon and quartz based MEMS high precision accelerometers
Authors: Kal, Santiram
Das, Soumen
Keywords: MEMS
High precision accelerometers
Silicon
Quartz
Issue Date: Apr-2007
Publisher: CSIR
IPC CodeB81B7/02, H05H
Abstract: Conventional electro-mechanical inertial sensors are being replaced by MEMS versions which are miniature in size, light weight, cost effective, more reliable and sensitive, low power consuming and VLSI compatible. Although silicon is the most widely used material for MEMS, quartz has some advantage for realizing inertial sensors due to its piezoelectric property. The R&D activities undertaken in the authors’ laboratory in the area of MEMS based silicon and quartz acceleration sensors have been described. While the silicon accelerometer is based on the piezoresistive technique, the quartz double ended tuning fork (DETF) accelerometer works on the stress dependence of vibration frequency.
Page(s): 299-303
ISSN: 0019-5596
Source:IJPAP Vol.45(04) [April 2007]

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