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Indian Journal of Engineering and Materials Sciences (IJEMS) >
IJEMS Vol.15 [2008] >
IJEMS Vol.15(4) [August 2008] >
| Title: | Influence of temperature stability on sensing properties of SAW NOx sensor |
| Authors: | Dewan, Namrata
Haridas, Divya
Shandilya, Swati
Sreenivas, K
Gupta, Vinay |
| Issue Date: | Aug-2008 |
| Publisher: | CSIR |
| Abstract: | This paper presents the study on the influence of temperature stability of SAW sensor on the sensing properties for NOx gas. Temperature stable SAW sensor based on 128º YX LiNbO₃ single crystal was developed after integrating with rf sputtered amorphous TeO₂ thin film that act as a temperature compensation over-layer. TeO₂ thin films possessing negative temperature coefficient of delay (TCD) also served as a sensing layer for the detection of NOx gas. Temperature stable SAW devices are essentially desired to avoid the problem of false alarm, besides the enhancement in the sensitivity and reliability. |
| Page(s): | 352-354 |
| ISSN: | 0971-4588 |
| Source: | IJEMS Vol.15(4) [August 2008]
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