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IJEMS Vol.15(4) [August 2008] >


Title: Influence of temperature stability on sensing properties of SAW NOx sensor
Authors: Dewan, Namrata
Haridas, Divya
Shandilya, Swati
Sreenivas, K
Gupta, Vinay
Issue Date: Aug-2008
Publisher: CSIR
Abstract: This paper presents the study on the influence of temperature stability of SAW sensor on the sensing properties for NOx gas. Temperature stable SAW sensor based on 128º YX LiNbO₃ single crystal was developed after integrating with rf sputtered amorphous TeO₂ thin film that act as a temperature compensation over-layer. TeO₂ thin films possessing negative temperature coefficient of delay (TCD) also served as a sensing layer for the detection of NOx gas. Temperature stable SAW devices are essentially desired to avoid the problem of false alarm, besides the enhancement in the sensitivity and reliability.
Page(s): 352-354
ISSN: 0971-4588
Source: IJEMS Vol.15(4) [August 2008]

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