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|Title:||Influence of temperature stability on sensing properties of SAW NOx sensor|
|Abstract:||This paper presents the study on the influence of temperature stability of SAW sensor on the sensing properties for NOx gas. Temperature stable SAW sensor based on 128º YX LiNbO₃ single crystal was developed after integrating with rf sputtered amorphous TeO₂ thin film that act as a temperature compensation over-layer. TeO₂ thin films possessing negative temperature coefficient of delay (TCD) also served as a sensing layer for the detection of NOx gas. Temperature stable SAW devices are essentially desired to avoid the problem of false alarm, besides the enhancement in the sensitivity and reliability.|
|Appears in Collections:|| IJEMS Vol.15(4) [August 2008]|
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