Please use this identifier to cite or link to this item:
Title: Design and simulation of optimum piezoelectric MEMS microactuator for smart control applications
Authors: Dutta, Soma
Issue Date: Apr-2008
Publisher: CSIR
Abstract: This paper presents the design and finite element simulation of a novel piezoelectric microactuator. The optimaly designed cantilever type piezoelectric microactuator deflects at its tip by converse piezoelectric effect. It consists of a thin film PZT layer, intimately attached with a variable thickness SOI elastic layer and electrically connected with top and bottom electrodes by contact pads. The goal of this coupled piezoelectric actuator design is to multiply the force by adding a support beam, placed closer to the fixed end and by varying the width of the active layer. Structural simulation employed commercial software tool ANSYS/COVENTORWARE and the results include free tip deflection, blocked force and mechanical stresses while subjecting the actuator to a prescribed input voltage.
Page(s): 99-103
ISSN: 0971-4588
Appears in Collections:IJEMS Vol.15(2) [April 2008]

Files in This Item:
File Description SizeFormat 
IJEMS 15(2) 99-103.pdf521.55 kBAdobe PDFView/Open

Items in NOPR are protected by copyright, with all rights reserved, unless otherwise indicated.