Please use this identifier to cite or link to this item:
http://nopr.niscair.res.in/handle/123456789/1793| Title: | Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing |
| Authors: | Hsieh, Kun-Lin |
| Keywords: | Artificial neural networks Dimensional analysis Dimensionless terms Function approximation |
| Issue Date: | Jul-2008 |
| Publisher: | CSIR |
| Abstract: | This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC manufacturing is employed to demonstrate rationality and effectiveness of proposed approach. |
| Description: | 505-511 |
| URI: | http://hdl.handle.net/123456789/1793 |
| ISSN: | 0022-4456 |
| Appears in Collections: | JSIR Vol.67(07) [July 2008] |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| JSIR 67(7) 505-511.pdf | 102.1 kB | Adobe PDF | View/Open |
Items in NOPR are protected by copyright, with all rights reserved, unless otherwise indicated.