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Journal of Scientific and Industrial Research (JSIR) >
JSIR Vol.67 [2008] >
JSIR Vol.67(07) [July 2008] >
| Title: | Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing |
| Authors: | Hsieh, Kun-Lin |
| Keywords: | Artificial neural networks
Dimensional analysis
Dimensionless terms
Function approximation |
| Issue Date: | Jul-2008 |
| Publisher: | CSIR |
| Abstract: | This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing
model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC
manufacturing is employed to demonstrate rationality and effectiveness of proposed approach. |
| Page(s): | 505-511 |
| ISSN: | 0022-4456 |
| Source: | JSIR Vol.67(07) [July 2008]
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