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Title: Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing
Authors: Hsieh, Kun-Lin
Keywords: Artificial neural networks;Dimensional analysis;Dimensionless terms;Function approximation
Issue Date: Jul-2008
Publisher: CSIR
Abstract: This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC manufacturing is employed to demonstrate rationality and effectiveness of proposed approach.
Page(s): 505-511
ISSN: 0022-4456
Appears in Collections: JSIR Vol.67(07) [July 2008]

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