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|Title:||Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing|
|Keywords:||Artificial neural networks;Dimensional analysis;Dimensionless terms;Function approximation|
|Abstract:||This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC manufacturing is employed to demonstrate rationality and effectiveness of proposed approach.|
|Appears in Collections:|| JSIR Vol.67(07) [July 2008]|
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