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Title: Effect of Calcination Temperature on Sensitivity of Tin Oxide Thin Film
Authors: Mishra, Sunita
Ghanshyam, C
Ram, Nathai
Singh, Satinder
Bajpai, R P
Bhasin, K K
Bedi, R K
Keywords: Tin oxide;Sensitivity;Grain size;Nanocrystalline;Sol-gel;Calcination temperature
Issue Date: Nov-2003
Publisher: NISCAIR-CSIR, India
Abstract: This paper describes the effect of calcination temperature on the gas sensitive properties of nanocrystalline tin oxide thin film. Nanocrystalline SnO2 thin films were prepared by sol-gel method using inorganic salt as a precursor material. Influence of calcination temperature was evaluated on the structural morphology and electrical characteristic of the film prepared by spin coating method. Scanning Electron Microscopy (SEM) revealed that with increasing calcination temperature the uniformity of the film increased. X-ray diffraction (XRD) measurements showed that the grain size increased from ~20 to 80 nm as the calcination temperature was increased from 100 to 600oC. In general, the preferred direction of smaller grain size is (110). At lower calcination temperatures, both the SnO2 peak and the SnO peaks were seen on XRD but only SnO2 peaks were observed at higher temperatures. The sensitivity of the tin oxide thin film to 500 ppm of alcohol vapors at the substrate temperature of 350oC was also grain size dependent. The sensitivity increased with decrease in grain size.
Page(s): 1063-1066
ISSN: 0975-1084 (Online); 0022-4456 (Print)
Appears in Collections:JSIR Vol.62(11) [November 2003]

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