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Indian Journal of Geo-Marine Sciences (IJMS) >
IJMS Vol.41 [2012] >
IJMS Vol.41(6) [December 2012] >
| Title: | Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications |
| Authors: | Yaacob, Mohd Ikhwan Hadi
Arshad, Mohd Rizal
Manaf, Asrulnizam Abd.
Rahman, Mohamad Faizal Abd
Samsuri, Siti Sarah |
| Keywords: | Piezoelectric
Receiving response
Resonance frequency
Hydrophone |
| Issue Date: | Dec-2012 |
| Publisher: | NISCAIR-CSIR, India |
| Abstract: | An effort to enhance receiving response
of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency
was reported. PMUTs were fabricated with the vibrating membrane formed by a
layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd
(Zt,Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered
with nickel electrodes. Spin coating and low temperature wafer bonding were
proposed as part of the key fabrication methods. Fabricated transducers were
characterized in the compact acoustic tank setup using 500 kHz and 1.25 MHz
reference projectors. Analyses revealed the maximum receiving response was
-36.6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20
V peak to peak of drive voltage on reference projector. Finally, response
spectrum of the transducer was plotted against two commercialized bulk
hydrophones at equivalent frequency band for validation and comparison. |
| Page(s): | 533-539 |
| CC License: |  CC Attribution-Noncommercial-No Derivative Works 2.5 India |
| ISSN: | 0975-1033 (Online); 0379-5136 (Print) |
| Source: | IJMS Vol.41(6) [December 2012]
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