Please use this identifier to cite or link to this item: http://nopr.niscair.res.in/handle/123456789/11602
Title: Roughness measurement using optical profiler with self-reference laser and stylus instrument — A comparative study
Authors: Chand, Mahesh
Mehta, Aarti
Sharma, Rina
Ojha, V N
Chaudhary, K P
Keywords: Surface texture
Optical profiler
Stylus profiler
Nanometrology
Issue Date: May-2011
Publisher: NISCAIR-CSIR, India
Abstract: Roughness is measured by two techniques namely optical profiler with self reference laser and stylus type instrument on roughness samples of nominal roughness average<i style=""> R<sub>a</sub></i> values 0.174, 0.610 and 1.77 <img src='/image/spc_char/micro.gif' border=0>m have been reported. Roughness parameters <i style="">R<sub>a,</sub></i><sub> </sub>and <i style="">R<sub>z</sub></i><sub> </sub>are measured by these two techniques. It has been observed that the results obtained by them are in good agreement within the uncertainty of measurement for roughness standards of nominal values 0.610 and 1.77 <img src='/image/spc_char/micro.gif' border=0>m. However for a nominal roughness 0.174 <img src='/image/spc_char/micro.gif' border=0>m, there is a disagreement between the results of optical and stylus measurements and is much beyond the uncertainty. Comparison and analysis of measurements carried out by these two methods reveal that this may be attributed to stylus radius.
Description: 335-339
URI: http://hdl.handle.net/123456789/11602
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.49(05) [May 2011]

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