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Title: Roughness measurement using optical profiler with self-reference laser and stylus instrument — A comparative study
Authors: Chand, Mahesh
Mehta, Aarti
Sharma, Rina
Ojha, V N
Chaudhary, K P
Keywords: Surface texture;Optical profiler;Stylus profiler;Nanometrology
Issue Date: May-2011
Publisher: NISCAIR-CSIR, India
Abstract: Roughness is measured by two techniques namely optical profiler with self reference laser and stylus type instrument on roughness samples of nominal roughness average Ra values 0.174, 0.610 and 1.77 m have been reported. Roughness parameters Ra, and Rz are measured by these two techniques. It has been observed that the results obtained by them are in good agreement within the uncertainty of measurement for roughness standards of nominal values 0.610 and 1.77 m. However for a nominal roughness 0.174 m, there is a disagreement between the results of optical and stylus measurements and is much beyond the uncertainty. Comparison and analysis of measurements carried out by these two methods reveal that this may be attributed to stylus radius.
Page(s): 335-339
ISSN: 0975-1041 (Online); 0019-5596 (Print)
Appears in Collections:IJPAP Vol.49(05) [May 2011]

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