NISCAIR Online Periodicals Repository

Research Journals >
Journal of Scientific and Industrial Research (JSIR) >
JSIR Vol.70 [2011] >
JSIR Vol.70(04) [April 2011] >

Title: Deposition of TiAlSiN hard film by cathodic arc plasma evaporation using a single target combined with a shield filter
Authors: Vinh, Pham Van
Ngoc, Tran Vu Diem
Keywords: Cathodic arc plasma
Shield filter
Single TiAlSi alloy target
Issue Date: Apr-2011
Publisher: NISCAIR-CSIR, India
Abstract: Films of TiAlSiN were deposited on AISI H13 tool steel substrate by a cathodic arc-plasma deposition system using a single TiAlSi alloy as target. Presence of TiN crystal phase was found on films, but no XRD peaks related to Al and Si were found. Hardness, morphology and adhesion of films changed with different deposition parameters. Maximum hardness (36.29GPa) of films was found on sample deposited at 300°C with 3x10‑3 Torr and cathode arc current of 45 A.
Page(s): 273-277
CC License:  CC Attribution-Noncommercial-No Derivative Works 2.5 India
ISSN: 0975-1084 (Online); 0022-4456 (Print)
Source:JSIR Vol.70(04) [April 2011]

Files in This Item:

File Description SizeFormat
JSIR 70(4) 273-277.pdf241.07 kBAdobe PDFView/Open
 Current Page Visits: 68 
Recommend this item


Online Submission of Articles |  NISCAIR Website |  National Knowledge Resources Consortium |  Contact us |  Feedback

Disclaimer: NISCAIR assumes no responsibility for the statements and opinions advanced by contributors. The editorial staff in its work of examining papers received for publication is helped, in an honorary capacity, by many distinguished engineers and scientists.

CC License Except where otherwise noted, the Articles on this site are licensed under Creative Commons License: CC Attribution-Noncommercial-No Derivative Works 2.5 India

Copyright © 2015 The Council of Scientific and Industrial Research, New Delhi. All rights reserved.

Powered by DSpace Copyright © 2002-2007 MIT and Hewlett-Packard | Compliant to OAI-PMH V 2.0

Home Page Total Visits: 163562 since 01-Sep-2015  Last updated on 21-Jun-2016Webmaster: