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|Title:||MEMS and NEMS based sensors for environmental monitoring and control|
|Authors:||Pant, B D|
Mishra, S N
|Abstract:||Environmental monitoring and control is a global issue of our modern-day living. The science and technology, on one hand has created marvelsto make our lives far more comfortable and productive than it used to be in earlier times, but on the other hand it has contaminated ourenvironment. The air, water and soil are polluted with several kinds of pollutions emanating from our transport, communication and industrialsystem. The quality of the air we breathe in, the water we drink, the food we eat have to be monitored against contaminations. We need tomonitor and control all such kinds of polluting agents. Additionally, we need to detect the harmful physical, chemical and biological materialspresent in the environment for a good health and longevity of human life. An efficient, portable and low power-powered system is the needof the day. The evolution of MEMS and NEMS technologies have demonstrated this kind of potentiality. With the development of thesetechnologies, an entirely new kind of miniature chemical and gas sensors, useful for environmental application, have come up utilizing a varietyof sensing materials and approaches. MEMS research at CEERI has been initiated in the tenth five year plan including the development of gassensors for environmental monitoring. For the sensing of hazardous gases in the environment e. g. carbon mono oxide and oxides of nitrogen,mainly two approaches have been followed i.e. inorganic (metal oxide based) and organic (polymer-based sensing) . Present paper is the workcarried out for the development of MEMS gas sensors based on composite polymers, utilizing electro-physical properties of the polymercomposites as sensing parameter. An array of eight sensing cells in four sizes 250×250, 300×300, 500×500 and 500×600 micron with a depth of 40 micron have been fabricated using SU-8 negative tone resist through UV-LIGA process. These cavities filled with different polymercomposites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication processin detail and the results obtained in ethanol and methanol ambient using a polymer composite comprised of Styrene and Polyaniline inPMMA.|
|ISSN:||0975-2412 (Online); 0771-7706 (Print)|
|Appears in Collections:||BVAAP Vol.18(2) [December 2010]|
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