Browsing by Author Parsad, Mahant

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Deposition of low stress polysilicon thin films using low-pressure chemical vapour depositionKumar, Mahesh; Parsad, Mahant; Goswami, Niranjana; Arora, Anil; Pant, B D; Dwivedi, V KIJPAP Vol.45(4) [April 2007]400-402