Browsing by Author Lai, Teng-Hsien

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Measurement of microstructure in micro electro mechanical systems using optical interferometric microscopeLin, Chern-Sheng; Fu, Shu-Hsien; Yeh, Mau-Shiun; Tsou, Chingfu; Lai, Teng-HsienIJPAP Vol.50(09) [September 2012]641-649