Browsing by Author I Khudiar, Ausama

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Characterization of low pressure plasma-dc glow discharges (Ar, SF6 and SF6/He) for Si etchingT Chiad, Bahaa; L Al-zubaydib, Thair; Khalaf, Mohammad K; I Khudiar, AusamaIJPAP Vol.48(10) [October 2010]723-730